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Showing 1 - 8 results of pdf books about 'Mask inspection'
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Mar 28, 2003 ... Development of 198.5nm wavelength mask inspection tool .... Inspection technologies for EPL and EUVL mask are under development. ...
http://www.eeel.nist.gov/812/conference/Presentations/Yoshioka.pdf
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Overview of advanced mask inspection optical system (AMOS) .... 1) Wavelength consistency between exposure system and mask inspection system ...
http://www.eeel.nist.gov/812/conference/2005_Talks/Tojo.pdf
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This paper presents a new shadow mask inspection method .... inspection. The specifications of the inspected shadow mask is listed in Table 1. ...
http://ieeexplore.ieee.org/iel2/561/4454/00174467.pdf?arnumber=174467
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Examples of full mask inspection. ● Gaps in pattern inspection for production needs .... Inspection tool sensitivity and recipe development with test mask ...
http://www.sematech.org/meetings/archives/litho/8059/pres/DI-02-Liang.pdf
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This paper describes the optimum mask inspection optics for the D-to-WI mask inspection. ..... The optics for the mask inspection system is set to have ...
http://www.springerlink.com/index/46457176n4607631.pdf
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Worldwide, this is the only EUV mask inspection tool offering ... SEMATECH Actinic Mask Inspection tool is fully operational. Scanning ...
http://www.amtc-dresden.com/content/dls/1DI01_Goldberg_EUV-actinic-inspection.pdf
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EIPBN 2008, K. A. Goldberg, et al.,. ID#: 218, Session 5B-4. Electronic mail: KAGoldberg@lbl.gov. 1. Actinic EUV Mask Inspection Beyond 0.25 NA ...
http://www.osti.gov/bridge/servlets/purl/941172-nEY49T/941172.pdf
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Figure 3: Mask image captured during inspection (left) and overlaid with ... In this section the mask inspection results for the three different masks are ...
http://www.amat.co.kr/products/assets/mask_products/inspection_of_production_alternating_psm_reticles_using_uv-based_365-nm_reticle_inspection_tool.pdf
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